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Rebuilt Diffusion Vacuum Pumps

We have diffusion vacuum pumps completely rebuilt from the ground up. Check out our selection.

Varian-HS-16 Diffusion Vacuum Pump Rebuilt, Refurbished

    Item Number: VARIAN-HS-16


    Warranty: 1 year past the documented date of installation.

    *Product images are for reference purposes only and do not necessarily correspond to the actual product.  

    Please call for price and availability

    IN STOCK - Please call for price and availability 855-466-6822

    Varian-HS-16 Diffusion Vacuum Pump Rebuilt, Refurbished

    Varian Diffusion Pumps Overview

    Features and Benefits

    Varian has earned its position as the leading Diffusion Pump manufacturer in the world by listening to customer needs and by continuously improving the performance and reliability of our benchmark designs. Throughout our more than forty years of leadership in the industry, we have consistently produced pumps that provide the most efficient means of converting heat into pumping throughput.

    Our experience has allowed us to optimize the design of every element of the pump. As a result, Varian Diffusion Pumps offer you the lowest cost of ownership available for many high vacuum-pumping applications.

    Options to Address Your Needs

    Many applications have unique requirements. Varian can provide additional features such as Halo or custom baffles to eliminate additional backstreaming, and a Quick Cool Coil option to accelerate system cycle times.

    Easy to Maintain

    Maintaining uptime is critical so we have simplified operation and maintenance. A sight glass provides visual indication of status when cold or hot and under vacuum. A gauge port facilitates system troubleshooting.

    Fully Optimized Jet

    Using our long and varied experience Varian designs and produces vapor jets that deliver the highest throughput, pressure stability, and tolerable foreline pressure available, while reducing backstreaming to a minimum.

    Built for Production Volumes

    Our success is in helping you meet the exacting requirements of your production process. Our pumps deliver superior pumping at high pressure and high gas flow conditions, and handle gas load variations that are typical of large volume production.

    Robust Boiler Design

    Through optimized boiler design, Varian pumps are stable and reliable under widely varying operating conditions. This temperature stability prolongs fluid life as well. Thermal protection switches prevent system over-temperature conditions.

    Low Cost of Ownership

    By providing the highest throughput available per unit of power, reduced cooling water requirements, and rugged, durable stainless steel construction, Varian delivers large volume pumping at the lowest total cost to you.

    World-class Service, Training and Support

    Varian's application consulting capability makes use of our unparalleled experience to identify the optimal solution for you. And we invite you to take advantage of our industry leading worldwide service and support programs and award winning Vacuum Training classes to maximize system uptime and productivity.

    Typical Applications

    Vapor Diffusion Pumps

    • Vacuum Furnaces
    • Vacuum Furnace applications require pumps that have the ability to achieve and maintain low base pressures and the ability to handle. The full fractioning design of the Varian diffusion pumps allows vaporized fluid to be fractionated in the boiler and jet assembly. Contamination and decomposition products are pumped away and only the purist fluid reaches the top jet, assuring highest speed and lowest backstreaming.

    • Metallizing
    • In web and roll coating systems, Varian diffusion pumps have the ability to pump high gas loads making them the perfect choice for continuous production applications.

    • Large Area Coating / Thin Film Deposition
    • Due to it's simplicity, high performance and low initial costs, the diffusion pump remains a primary pumping mechanism for large area coating systems. The large pumps used in this application come equipped with sight glass and drain assemblies and are also available with ASA or ISO flanges.

    • Coatings (Optical, Electronics, Protective)
    • With low ultimate pressure, high speed, high throughput and high tolerable forepressure, Varian diffusion pumps are the best choice for developmental and production systems.

    • Molecular Beams
    • The foreline ejector stage provides high tolerable forepressure and a large surface area for efficient degassing of compressed fluid, while the foreline baffle minimizes fluid loss even under high throughput conditions.

    All Varian pumps incorporate an ejector stage as well as full fractionating jets. HS Series pumps create high speed and low ultimate pressure, high throughput and high tolerable forepressure and low backstreaming combine to make the HS series the best diffusion pump.

    Pumps are equipped with full thermal protection.

    Application Notes for Diffusion Pumps

    As the worldwide diffusion pump market leader, Varian produces the most comprehensive family of pumps, ranging from 2 in. to 35 in. in diameter, and is the only broad-line, U.S.-based manufacturer.

    The diffusion pump is the most common type of pump for use in high vacuum applications. These vapor jet pumps are one of the oldest and most reliable ways to create a vacuum.

    Since the chamber itself has no moving parts aside from the oil droplets, a vacuum diffusion pump can operate with stability over long periods. In all diffusion pumps, a small amount of backstreaming occurs. Backstreaming is the migration of minute levels of oil that move in the opposite direction toward the inlet of the pump and into the process stream, which may be the stage of an electron microscope or a welding chamber. In some applications, minor backstreaming has no impact; in others, where the purity of materials is critical, backstreaming cannot be tolerated. For this reason, systems typically add an optically dense baffle of varying design to deflect oil particles before they can reach the process stream.

    Diffusion pumps are in wide use because they have several advantages: They are reliable, simple in design, operate without noise or vibration, and are relatively inexpensive to operate and maintain. In fact, diffusion pumping is still the most economical means of creating high-vacuum environments. These pumps also tolerate operating conditions such as excess particles and reactive gases that would destroy other types of high-vacuum pumps.

    With the proper choice of motive fluids, traps, baffles, and valves, diffusion pumps can be used in a wide variety of applications and over pressure ranges from 1 x 10-3 torr to 2 x 10-11 torr

    Key Features of Varian Diffusion Pumps include:

    • High pumping speeds
    • High throughput
    • High forepressure tolerance
    • Low ultimate pressure
    • Excellent backstreaming characteristics
    • Long-term reliability
    Previous Model Number 0164
    Speed, l/s (operating range)
    Helium & Hydrogen

    Maximum forepressure, Torr (mbar)
    No load
    Full load

    0.65 (0.85)
    0.55 (0.72)
    Maximum throughput
    T-l/s (mbar-l/s) In operating range
    @ 1 x 10-2 Torr (1.3 x 10-2 mbar)

    9.5 (11.7) at 8100 W
    11.5 (15.3) at 8100 W
    Minimum recommended backing pump
    for maximum throughput, cfm (m3/hr)

    80 (136)
    Backstreaming rate at inlet flange
    mg/cm2/min (standard cold cap)

    1.5 x 10-3
    Warmup time, minutes 45
    Cooldown time, minutes
    With quick cool coil, where applicable

    Fluid charge 5 U.S. qts. (2.8 liters)
    Electrical requirements 3 ph
    50/60 Hz
    240/415/480 V
    Power, Watts 8100/9600
    Cooling water, U.S. gpm (l/hr)
    at 60-80 °F (15-26 °C)
    1.5 (300)

    IVS is committed to your complete satisfaction.  To ensure the greatest success and performance of your new vacuum equipment purchase, please call an IVS representative today at 855-466-6822 or simply fill out our contact form here: Contact IVS and a Sales Engineer will contact you within 24 hours.

    Not exactly what you're looking for? Innovative Vacuum Solutions is a total solutions provider and can customize or configure your vacuum equipment. Call us toll free at 855-466-6822 and speak to a Sales Engineer to determine your specific needs.


    Our precision vacuum pump rebuild process restores worn or damaged equipment back to the original manufacturers specifications and
    costs a fraction of purchasing new components. Each unit reconditioned by IVS is supported by the most competitive,
    practical warranty in the business: one year from the documented date of installation, not shipment.

    Click here to see the full IVS Business Practical Warranty
    • IVS will safely package your product for shipment at no additional charge.
    • Buyer is responsible for all shipping arrangements and charges.
    • Please allow ten days for delivery from order date to allow for certification and shipping of your equipment.

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