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Rebuilt Dry Claw Vacuum Pumps

Dry claw vacuum pumps 100% rebuilt, restored to original equipment manufacturers specifications.

Edwards IH80 Claw Type Dry Vacuum Pump Rebuilt Refurbished

Edwards IH80 Claw Type Dry Vacuum Pump Rebuilt Refurbished
    Item Number: EDWARDS-IH80

    Warranty: 1 year past the documented date of installation.

    *Product images are for reference purposes only and do not necessarily correspond to the actual product.  

    Please call for price and availability

    IN STOCK - Please call for price and availability 855-466-6822

    Edwards IH80 Claw Type Dry Vacuum Pump Rebuilt Refurbished

    Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

    The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.

    Features & Benefits

    • Optimized utilities consumption.
    • Front/Reversed Facilities
    • No preventative maintenance required.
    • Cantilevered shafts and specially profiled rotors for better handling of particles.
    • Reserve motor power also maximizes reliability on harsh-duty CVD applications.
    • Corrosion resistant materials allow pumping of corrosive gases.


    • Load Lock
    • Transfer
    • Metrology
    • Lithography
    • PVD Process
    Peak Speed 103 m3 h-1
    61 cfm
    1717 l min-1
    Ultimate Vacuum 1 x 10-2 mbar
    7.5 x 10-3 Torr
    1 Pa
    Typical shaft seal nitrogen flow 4 slm
    Inlet Connection ISO63
    Outlet Connection NW40
    Typical cooling water flow at 15
    psi pressure drop
    120 l h-1
    2 l h-1
    Weight 240 kg
    Power input at ultimate 2.7 kW
    Rated motor power 3.5 kW
    Oil Capacity 0.7 l

    All figures are typical without gas ballast.

    IVS is committed to your complete satisfaction.  To ensure the greatest success and performance of your new vacuum equipment purchase, please call an IVS representative today at 855-466-6822 or simply fill out our contact form here: Contact IVS and a Sales Engineer will contact you within 24 hours.

    Not exactly what you're looking for? Innovative Vacuum Solutions is a total solutions provider and can customize or configure your vacuum equipment. Call us toll free at 855-466-6822 and speak to a Sales Engineer to determine your specific needs.


    Our precision vacuum pump rebuild process restores worn or damaged equipment back to the original manufacturers specifications and
    costs a fraction of purchasing new components. Each unit reconditioned by IVS is supported by the most competitive,
    practical warranty in the business: one year from the documented date of installation, not shipment.

    Click here to see the full IVS Business Practical Warranty
    • IVS will safely package your product for shipment at no additional charge.
    • Buyer is responsible for all shipping arrangements and charges.
    • Please allow ten days for delivery from order date to allow for certification and shipping of your equipment.

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