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11461 N US Hwy 301
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Turbomolecular Vacuum Pumps Reconditioned

IVS has fully reconditioned turbo pumps in stock and ready to go!

Pfeiffer TMH262 RTG ISO100/TC100 Turbomolecular Vacuum Pump Rebuilt, Refurbished

Pfeiffer TMH262 RTG ISO100/TC100 Turbomolecular Vacuum Pump Rebuilt, Refurbished
    Item Number: PMP02991

    $4,495.00

    Warranty: 1 year past the documented date of installation.

    *Product images are for reference purposes only and do not necessarily correspond to the actual product.  


    IN STOCK

    Pfeiffer TMH262 RTG ISO100/TC100 Turbomolecular Vacuum Pump Rebuilt, Refurbished

    Pfeiffer Turbo Drag Pumps

    Turbo Drag Pumps with integrated drive for corrosive gas vacuum applications

    High throughput and safe pumping of aggressive gases with economical fore-vacuum costs

    Customer benefits

    • Surfaces that come in contact with the gases are corrosion-proofed
    • Integrated purge gas system (to protect bearings and motor)
    • Highest uptime
    • Low system costs
    • Maximum operating safety
    • Low operating costs

    Areas of application

    All techniques and applications involving pumping fo corrosive gases, such as

    • Semiconductor process technology
      HDP etching
      HDP, CVD, PVD
      Ion implementation
      MBE, MOMBE
      Sputter processes
    • Coating technology
    • Mass spectrometers and process gas monitors
    • Research and development
    • Ion implementation

    Explanation of abbreviations used

    P = Purge gas

    C = Corrosive gas

    H = High throughput (optimized gas flow)

    T = Temperature Management System

    M = Magnetic (rotor with magnetic bearing)

    Connection flange
    (input)
    (output)

    DN 100 ISO-K
    DN 25 ISO-KF
    Rotational speed
    ± 2%
    Stand-by

    833 1/min
    550 1/min
    Ultimate pressure
    with single stage rotary vane pump
    with diaphragm pump

    < 1 x 10-8 mbar
    < 1 x 10-8 mbar
    Gas throughput
    CF4
    N2
    Ar

    6 mbar l/s
    5.5 mbar l/s
    6.5 mbar l/s
    Pumping speed
    CF4
    N2
    Ar

    160 l/s
    190 l/s
    180 l/s
    Compression ratio
    CF4
    N2
    Ar

    3 x 108
    3 x 108
    3 x 108
    Cooling method, standard Water
    Cooling water consumption 100 l/h
    Filling: oil 35 cm3
    Run-up time 1.5 min
    Recommended backing pump MD4TC, Duo-Line, UniDry
    Temperature Management System (TMS) no

    Final pressure can only be achieved with a metal seal for the HV flange.

    Final pressure with standard elastomer seal: < 1 x 10-8. The gas flow values apply for a HV pressure of 0.1 mbar.

    IVS is committed to your complete satisfaction.  To ensure the greatest success and performance of your new vacuum equipment purchase, please call an IVS representative today at 855-466-6822 or simply fill out our contact form here: Contact IVS and a Sales Engineer will contact you within 24 hours.

    Not exactly what you're looking for? Innovative Vacuum Solutions is a total solutions provider and can customize or configure your vacuum equipment. Call us toll free at 855-466-6822 and speak to a Sales Engineer to determine your specific needs.



    Our precision vacuum pump rebuild process restores worn or damaged equipment back to the original manufacturers specifications and
    costs a fraction of purchasing new components. Each unit reconditioned by IVS is supported by the most competitive,
    practical warranty in the business: one year from the documented date of installation, not shipment.

    Click here to see the full IVS Business Practical Warranty
    • IVS will safely package your product for shipment at no additional charge.
    • Buyer is responsible for all shipping arrangements and charges.
    • Please allow ten days for delivery from order date to allow for certification and shipping of your equipment.

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