Leybold TURBOVAC TW 70 H Turbomolecular Vacuum Pump Rebuilt Refurbished
Item Number: LEYBOLD-TURBOVAC-TW-70-H
Warranty: 1 year past the documented date of installation.
*Product images are for reference purposes only and do not necessarily correspond to the actual product.
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Leybold TURBOVAC TW 70 H Turbomolecular Vacuum Pump Rebuilt Refurbished
TURBOVAC Product Line
The TURBOVAC pumps are turbomolecular pumps with mechanical rotor suspension which are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-10 Torr). Pumping speeds for air vary from 35 l x s-1 (inlet flange diameter = 40 mm (1.57 in.)) to 1,600 l x s-1 (inlet flange diameter = 250 mm (9.84 in.)).
Through the compact design, the most reliable ceramics ball bearings and the simplicity of operation, this line of pumps is used in all high vacuum and ultrahigh vacuum areas of application.
In particular the TURBOVAC pumps are very successfully operated in mass spectroscopy applications, gas and liquid chromatographic analysis,
CD, DVD and hard disk production, manufacturing of large-surface optical layers, and non-corrosive semiconductor fabrication processes.
The most important advantages of the TURBOVAC product line are:
Oil-free pumps for the generation of clean high and ultra-high vacuum conditions
Highly performance in any orientation
Highly degree of operating reliability
Easy to operate
Compact design
Ceramic Ball Bearings Technology
All TURBOVAC pumps are fitted with ceramic ball bearings, i.e. ceramicballs are running in steel races. The bearings are lubricated for life by
grease.
Ceramic balls are lighter, harder and smoother than balls made of steel. Therefore, with ceramic balls the wear on the races is significantly reduced. Consequently, the lifetime of the bearings, and hence the lifetime of the pump, is increased.
The TURBOVAC pumps fitted with grease-lubricated ceramic ball bearings can be mounted in any orientation. As the ball bearing is encapsulated, the grease can not enter the highvacuum space, even if the pump is mounted up-side-down.
Typical Applications
Mass spectrometers
Electron beam microscopy
Leak detectors
R & D, e.g. UHV systems
Load locks and transfer chambers
Technical Features
Integrated or external frequency converter
Compact design
Operation in any orientation
High foreline tolerance
Oil-free pump for generating clean high and ultrahigh vacuum conditions
Advantages to the User
Space-saving
Easy to integrate into complex vacuum systems
Allows the use of down-sized forevacuum pumps
Low operating costs
Highly reliable operation
TURBOVAC TW 70 H
Inlet flange
DN
O-ring sealed
63 ISO-K
Metal sealed
63 CF
Pump housing
Aluminum
Stainless steel
Pumping speed at 10-5 / 10-3 mbar
N2
Ar
H2
He
l x s-1
l x s-1
l x s-1
l x s-1
60 / 56
56 / 54
40 / 38
52 / 50
60 / 56
56 / 54
40 / 38
52 / 50
Max. gas throughput 1) at 10-1 mbar
N2
AR
H2
He
mbar x I x s-1
mbar x I x s-1
mbar x I x s-1
mbar x I x s-1
1.9
2.4
1.3
1.9
1.9
2.4
1.3
1.9
Max. compression when idle
N2
Ar
H2
He
1 x 108 at 14 mbar
1 x 106 at 14 mbar
1 x 104 at 0.2 mbar
2 x 102 at 2 mbar
1 x 1010 at 10 mbar
Ultimate pressure
with two stage oil sealed
rotary vane vacuum pump
TRIVAC D 2,5 E